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ZAT487 PROSES FABRIKASI SEMIKONDUKTOR (SEMICONDUCTOR FABRICATION PROCESSES)
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General
Welcome to ZAT487 (Semiconductor Fabrication Processes)
Announcements
14 October - 20 October
Teaching Plan
Course Introduction
Introduction to Semiconductor Fabrication
Recorded class lecture: Introduction to Semiconductor Fabrication
Reading Assignment: Chapter 1, Jaeger (Introduction to Microelectronic Fabrication)
Crystal Growth: Sand to Polysilicon
Recorded class lecture: Crystal Growth-Sand to Polysilicon
Crystal Growth: Polycrystalline to Monocrystalline Silicon
21 October - 27 October
Wafer Preparation
Recorded class lecture: Wafer preparation
Wafer Characterization
Cleanroom
28 October - 3 November
Recorded Lecture: Cleanroom & Thermal Oxidation
Thermal Oxidation
Recorded lecture: Thermal Oxidation
4 November - 10 November
Photolithography
Recorded Lecture:Thermal Oxidation & Photolithography
Recorded Lecture: Photolithography 2 (Thursday)
Recorded Lecture: Photolithography 3 (Friday)
11 November - 17 November
Photolithography 2
Recorded Lecture: Photolithography Part 2
18 November - 24 November
Assignment 1
Etching
Recorded lecture: Etching
Diffusion
Recorded lecture: Diffusion
Ion Implantation
Recorded lecture Ion Implantation (Friday)
25 November - 1 December
Recorded lecture Ion implantation 2 (Monday)
Test 1 (Answer Scheme)
Assignment 1 (Answer scheme)
9 December - 15 December
Lecture notes 12: Thin Film Deposition (Part 1)
Recap: What is a semiconductor?
Recap: What is a transistor?
Recap: What is a microchip?
WEBEX 121224 - Thin Film Deposition
Thermal evaporation (animation)
16 December - 22 December
Loadlock: Transfer arm
DC vs. RF sputtering
Magnetron sputtering
WEBEX 161224
WEBEX 191224
Lecture notes 12: Thin Film Deposition (Part 2)
CVD process animation
CVD vs. PVD?
PECVD machine
LPCVD
Epitaxy
Silicon epitaxial wafer by NEXTWAFE
23 December - 29 December
WEBEX 231224 (1ST HOUR)
Lecture notes 13: Process Integration
WEBEX 231224 (2ND HOUR)
Assignment 2
WEBEX 261224 & 271224
30 December - 5 January
Lecture notes 14: Interconnections & Contacts
WEBEX 301224
Electromigration of copper
TSMC's First Breakthrough: The Copper/Low-K Interconnect Transition
Optical interconnects?
All about interconnects
6 January - 12 January
Group Experiment: Process and Characterisation
Group Members
Rubric for Group Experiment
13 January - 19 January
Group Presentation: Guidelines
Group Presentation: Rubric
Test 2: 23rd January 2025
Review Class
27 January - 2 February
Assignment 2 (Answer Scheme)
Test 2 (Answer Scheme)
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Course info
ZAT487 PROSES FABRIKASI SEMIKONDUKTOR (SEMICONDUCTOR FABRICATION PROCESSES)
Lecturer:
DR. MOHD MARZAINI BIN MOHD RASHID
Lecturer:
PROFESOR MADYA TS. DR. MOHD ZAMIR BIN PAKHURUDDIN
Skill Level
:
Beginner
