Summary of EEE537 PERANTI SEMIKONDUKTOR DAN TEKNOLOGI PEPEJAL (SEMICONDUCTOR DEVICES AND SOLID STATE TECHNOLOGY)

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INTRODUCTION TO THE COURSE

Link for 2nd part Lecture

PART 1 LECTURE WEEK 1

EEE537 INTRODUCTION

EEE537 LECTURE 1 (INTRODUCTION TO MOS)

EEE537 TUTORIAL 1

PART 1 LECTURE WEEK 2

EEE537 LECTURE 2 (NON IDEAL MOS)

EEE537 TUTORIAL 2

PART 1 LECTURE WEEK 3

EEE537 LECTURE 3 (MOSFET FUNDAMENTALS)

EEE537 TUTORIAL 3

PART 1 MINI PROJECT

Mini project I - MOS fundamentals

Mini Project 2 - MOSFET Scaling

Mini Project 2 (Rubric)

MINI PROJECT PRESENTATION

PART 1 LECTURE WEEK 5

EEE537 LECTURE 4 (MOSFET SCALING)

EEE537 TUTORIAL 4

TEST 1 PREPARATION

TEST 1 SOLUTION

PART 1 APPENDIX

PART 2 1st Lecture-2 December - 8 December

Lecture 1- Introduction of Transistor Fabrication (Part 2)

16 December - 22 December

Lecture 2-1-Thermal Oxidation

Lecture 2-2-Thermal Oxidation

Lecture 2-2-Thermal Oxidation

30 December - 5 January

Lecture 3-CVD and PVD

6 January - 12 January

Lecture 4-LOCOS/Isolation technology

13 January - 19 January

Lecture 5- Silicide fabrication

An example exercise Thermal and CVD technique

Assignment 1-3 EEE537

past year exercise

past year exercise

20 January - 26 January

Lecture 6- Interconnect

Lecture 7-FINFET

Lecture 7-2-FINFET

Summary of fabrication topic

answer script assignment

Answer script TEST 2

Additional NOTE CVD PVD

Addtitional notes PVD CVD

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