ZAT487 - PROSES FABRIKASI SEMIKONDUKTOR
(SEMICONDUCTOR FABRICATION PROCESSES)
[ 4 Unit ]
*** Sumber data : SMUP
📖 Sinopsis Kursus / Course Synopsis ▼
Penumbuhan ingot semikonduktor, persediaan dan pencirian wafer, pengoksidaan dan proses litografi. Resapan dopan dan penghasilan simpangan. Pelogaman. Pencirian simpangan, contoh-contoh simpangan seperti kedalaman simpangan dsbnya. Teknik filem nipis, perkembangan litar bersepadu, ikatan dan pembungkusan.
Growth of semiconductor ingot, preparation and characterization of wafer, oxidation and lithography process. Diffusion of dopant and creation of junction. Metallization. Characterization of junction,example junction depth, etc. Thin film techniques, integrated circuit development, bonding and packaging.
*** Sumber data : SPBPK
📋 Hasil Pembelajaran Kursus / Course Learning Outcomes (HPK / CLO) ▼
| HPK / CLO | Penerangan HPK / CLO Description | Kaedah Pengajaran / Teaching Method | Pemetaan / Mapping: PLO USM |
Pemetaan / Mapping: LT |
|---|---|---|---|---|
| CLO1 | Analyse processes involved in fabrication of wafer and semiconductor devices. | Kuliah dan lain F2F | PLO1 | C4 |
| CLO2 | Produce semiconductor samples on silicon wafer or glass substrate based on the fabrication processes. | Makmal | PLO3 | P3 |
| CLO3 | Present semiconductor fabrication processes clearly and with confidence. | Kuliah dan lain F2F | PLO5 | A3 |
| CLO4 | Organise information related to semiconductor fabrication processes. | Kuliah dan lain F2F | PLO6 | C4 |
*** Sumber data : SPBPK
📊 Penilaian / Assessment ▼
| Komponen Penilaian / Assessment Component | Peratusan / Percentage |
|---|---|
| Kerja Kursus / Course Work | 40% |
| Peperiksaan Akhir (PA) / Exam Work | 60% |
*** Sumber data : SMUP