EBB323 - TEKNOLOGI FABRIKASI SEMIKONDUKTOR
(SEMICONDUCTOR FABRICATION TECHNOLOGY)
[ 3 Unit ]
*** Sumber data : SMUP
📖 Sinopsis Kursus / Course Synopsis ▼
Pelajar akan meneroka prinsip sains di sebalik proses fabrikasi semikonduktor, termasuk pertumbuhan hablur, pemurnian, pengoksidaan, implantasi ion, litografi, dan pemendapan filem nipis. Kursus ini melengkapkan pelajar dengan pemahaman teknikal dan kemahiran asas untuk menganalisis, menilai dan mengaplikasikan proses fabrikasi wafer silikon dalam industri semikonduktor.
Students will explore scientific principles behind semiconductor fabrication processes, including crystal growth, purification, oxidation, ion implantation, lithography, and thin film deposition. This course equips students with the foundational knowledge and technical skills to analyze, evaluate, and apply silicon wafer processing techniques relevant to modern semiconductor manufacturing.
*** Sumber data : SPBPK
📋 Hasil Pembelajaran Kursus / Course Learning Outcomes (HPK / CLO) ▼
| HPK / CLO | Penerangan HPK / CLO Description | Kaedah Pengajaran / Teaching Method | Pemetaan / Mapping: PLO USM |
Pemetaan / Mapping: LT |
|---|---|---|---|---|
| CLO1 | Able to apply knowledge on semiconductor fabrication technologies (I), including crystal growth, wafer preparation, oxidation, epitaxial growth, doping, and etching processes | Kuliah | PLO2 | C3 |
| CLO2 | Able to analyze semiconductor fabrication technologies (II), including thin film deposition, process integration, semiconductor packaging, and yield analysis. | Kuliah | PLO2 | C4 |
| CLO3 | Able to apply knowledge of process integration for device fabrication and technologies, including contamination control, challenges in semiconductor industry, vacuum science technology such as kinetic theory of gases, gas flow and conductance, vacuum pumps and vacuum pressure measurement. | Kuliah | PLO2 | C3 |
*** Sumber data : SPBPK
📊 Penilaian / Assessment ▼
| Komponen Penilaian / Assessment Component | Peratusan / Percentage |
|---|---|
| Kerja Kursus / Course Work | 30% |
| Peperiksaan Akhir (PA) / Exam Work | 70% |
*** Sumber data : SMUP